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높은 선택비와 매끄러운 식각 표면을 갖는 BCB 식각 공정에 관한 연구

DC Field Value Language
dc.contributor.advisor전국진-
dc.contributor.author김일환-
dc.date.accessioned2010-02-02T07:08:19Z-
dc.date.available2010-02-02T07:08:19Z-
dc.date.copyright2004.-
dc.date.issued2004-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000053679kog
dc.identifier.urihttps://hdl.handle.net/10371/48335-
dc.description학위논문(석사)--서울대학교 대학원 :전기·컴퓨터공학부,2004.ko
dc.format.extent32 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subjectBCBko
dc.subjectBcbko
dc.subject건식 식각ko
dc.subjectDry etchingko
dc.subjectmicromaskingko
dc.subjectMicromaskingko
dc.subjectAu maskko
dc.subjectAu maskko
dc.subjectMEMSko
dc.subjectMemsko
dc.title높은 선택비와 매끄러운 식각 표면을 갖는 BCB 식각 공정에 관한 연구ko
dc.typeThesis-
dc.contributor.department전기·컴퓨터공학부-
dc.description.degreeMasterko
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Master's Degree_전기·정보공학부)
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