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(A)Study on multi-arrayable micro E-beam lighography system using MEMS technology : 멤즈기술을 이용한 다중배열 가능한 초소형 전자빔 노광장치에 관한 연구

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dc.contributor.advisor전국진-
dc.contributor.author김학-
dc.date.accessioned2010-02-02T16:07:21Z-
dc.date.available2010-02-02T16:07:21Z-
dc.date.copyright2005.-
dc.date.issued2005-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000050121eng
dc.identifier.urihttps://hdl.handle.net/10371/48897-
dc.descriptionThesis(doctoral)--서울대학교 대학원 :전기컴퓨터공학부, 2005.en
dc.format.extentxi, 130 leavesen
dc.language.isoenen
dc.publisher서울대학교 대학원en
dc.subject전자빔 리소그래피en
dc.subjectelectron beam lithographyen
dc.subject초소형전자총en
dc.subjectmicrocolumnen
dc.subject집적형 초소형 전자총en
dc.subjectmonolithic microcolumnen
dc.subject몬테카를로 시뮬레이션en
dc.subjectMonte-Carlo simulationen
dc.subject전자광학 시뮬레이션en
dc.subjectelectron optics simulationen
dc.subject전계방출원en
dc.subjectfield emission tipen
dc.subject냉전계방출원en
dc.subjectcold field emission tipen
dc.subject입력 전자광학렌즈en
dc.subjectsource lensen
dc.subject양극접합en
dc.subjectanodic bondingen
dc.subject구리 도금en
dc.subjectCu electroplatingen
dc.subject이방성 건식식각en
dc.subjectdeep silicon etchingen
dc.subject편향계en
dc.subjectdeflectoren
dc.subject아인젤렌즈en
dc.subjecteinzel lensen
dc.subject단전위 렌즈en
dc.subjectelectrostatic fielden
dc.subject정전장 렌즈en
dc.subjectSPICEen
dc.subject스파이스en
dc.subjectMEMSen
dc.subject마이크로머시닝 기술.en
dc.title(A)Study on multi-arrayable micro E-beam lighography system using MEMS technologyen
dc.title.alternative멤즈기술을 이용한 다중배열 가능한 초소형 전자빔 노광장치에 관한 연구en
dc.typeThesis-
dc.contributor.department전기컴퓨터공학부-
dc.description.degreeDoctoren
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