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전자력 구동 방식 비간섭 2 자유도 실리콘 스캐닝 미러 : Electromagnetic silicon scanning mirror of 2 DOF without crosstalk between axes of rotation

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Authors

안시홍

Advisor
김용권
Issue Date
2003
Publisher
서울대학교 대학원
Keywords
스캐닝 미러2 자유도간섭 회전독립 제어공진 주파수실리콘
Description
학위논문(박사)--서울대학교 대학원 :전기컴퓨터공학부,2003.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058527

https://hdl.handle.net/10371/48903
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