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Simulated Annealing을 이용한 0.16㎛급 위상 변이 마스크(phase shift mask)최적화에 관한 연구
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- Authors
- Advisor
- 이성묵
- Issue Date
- 1998
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :과학교육과 물리전공,1998.
- Language
- Korean
- URI
- http://library.snu.ac.kr/search/DetailView.ax?sid=1&cid=0000757616
https://hdl.handle.net/10371/49812
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