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원격플라즈마 유기금속화학기상증착법에 의한 GaN 및 InGaN 박막의 성장 : Growth of GaN and InGaN thin films by remote plasma enhanced metalorganic chemical vapor deposition
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- Authors
- Advisor
- 윤의준
- Issue Date
- 1998
- Publisher
- 서울대학교 대학원
- Keywords
- GaN ; remote plasma enhanced metalorganic chemical vapor deposition ; InGaN ; 2-step growth ; 원격플라즈마 유기금속화학기상증착법 ; nitridation ; 이단계 성장 ; In incorporation ; 질화처리
- Description
- 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1998.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000076529
https://hdl.handle.net/10371/50777
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