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유기금속 화학증착법에 의한 고유전율(Ba,Sr) TiO₃ 박막의 증착 및 유전 특성 연구 : Preparation and dielectric properties of (Ba,Sr) TiO₃ thin films by metal organic chemical vapor deposition
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- Authors
- Advisor
- 김형준
- Issue Date
- 1997
- Publisher
- 서울대학교 대학원
- Keywords
- 캐패시터 ; (Ba,Sr)TiO₃(BST) ; 유기금속 화학증착법 ; Capacitor ; 펄스주입법 ; MOCVD ; 산화막환산두께 ; Pulse Injection Method ; 유전상수 ; SiO₂ equivalent thickness
- Description
- 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1997.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079656
https://hdl.handle.net/10371/50783
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