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유기금속 화학증착법에 의한 고유전율(Ba,Sr) TiO₃ 박막의 증착 및 유전 특성 연구 : Preparation and dielectric properties of (Ba,Sr) TiO₃ thin films by metal organic chemical vapor deposition
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 김형준 | - |
dc.contributor.author | 조호진 | - |
dc.date.accessioned | 2010-02-05T06:39:48Z | - |
dc.date.available | 2010-02-05T06:39:48Z | - |
dc.date.copyright | 1997. | - |
dc.date.issued | 1997 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079656 | kog |
dc.identifier.uri | https://hdl.handle.net/10371/50783 | - |
dc.description | 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1997. | ko |
dc.format.extent | xiv, 157 장 | ko |
dc.language.iso | ko | ko |
dc.publisher | 서울대학교 대학원 | ko |
dc.subject | 캐패시터 | ko |
dc.subject | (Ba,Sr)TiO₃(BST) | ko |
dc.subject | 유기금속 화학증착법 | ko |
dc.subject | Capacitor | ko |
dc.subject | 펄스주입법 | ko |
dc.subject | MOCVD | ko |
dc.subject | 산화막환산두께 | ko |
dc.subject | Pulse Injection Method | ko |
dc.subject | 유전상수 | ko |
dc.subject | SiO₂ equivalent thickness | ko |
dc.title | 유기금속 화학증착법에 의한 고유전율(Ba,Sr) TiO₃ 박막의 증착 및 유전 특성 연구 | ko |
dc.title.alternative | Preparation and dielectric properties of (Ba,Sr) TiO₃ thin films by metal organic chemical vapor deposition | ko |
dc.type | Thesis | - |
dc.contributor.department | 무기재료공학과 | - |
dc.description.degree | Doctor | ko |
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