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유기금속 화학증착법에 의한 고유전율(Ba,Sr) TiO₃ 박막의 증착 및 유전 특성 연구 : Preparation and dielectric properties of (Ba,Sr) TiO₃ thin films by metal organic chemical vapor deposition

DC Field Value Language
dc.contributor.advisor김형준-
dc.contributor.author조호진-
dc.date.accessioned2010-02-05T06:39:48Z-
dc.date.available2010-02-05T06:39:48Z-
dc.date.copyright1997.-
dc.date.issued1997-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079656kog
dc.identifier.urihttps://hdl.handle.net/10371/50783-
dc.description학위논문(박사)--서울대학교 대학원 :무기재료공학과,1997.ko
dc.format.extentxiv, 157 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subject캐패시터ko
dc.subject(Ba,Sr)TiO₃(BST)ko
dc.subject유기금속 화학증착법ko
dc.subjectCapacitorko
dc.subject펄스주입법ko
dc.subjectMOCVDko
dc.subject산화막환산두께ko
dc.subjectPulse Injection Methodko
dc.subject유전상수ko
dc.subjectSiO₂ equivalent thicknessko
dc.title유기금속 화학증착법에 의한 고유전율(Ba,Sr) TiO₃ 박막의 증착 및 유전 특성 연구ko
dc.title.alternativePreparation and dielectric properties of (Ba,Sr) TiO₃ thin films by metal organic chemical vapor depositionko
dc.typeThesis-
dc.contributor.department무기재료공학과-
dc.description.degreeDoctorko
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