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원격플라즈마 유기금속화학증착법에 의한 저온 GaN 박막 성장 및 플라즈마 발광 특성 분석 : Low-temperature growth of GaN thin films by remote plasma-enhanced metal-organic chemical vapor deposition and optical emission characterization of plasma
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 윤의준 | - |
| dc.contributor.author | 손철수 | - |
| dc.date.accessioned | 2010-02-05T06:39:54Z | - |
| dc.date.available | 2010-02-05T06:39:54Z | - |
| dc.date.copyright | 1997. | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079654 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/50785 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1997. | ko |
| dc.format.extent | xiv, 195 p. | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | GaN | ko |
| dc.subject | remote plasma-enhanced metal-organic chemical vapor deposition | ko |
| dc.subject | 원격플라즈마 유기금속화학증착법 | ko |
| dc.subject | optical emission spectroscopy | ko |
| dc.subject | 광학발광분광법 | ko |
| dc.subject | low temperature growth | ko |
| dc.subject | 저온 성장 | ko |
| dc.subject | GaN buffer layer | ko |
| dc.subject | 질소 플라즈마 | ko |
| dc.subject | nitrogen plasma | ko |
| dc.title | 원격플라즈마 유기금속화학증착법에 의한 저온 GaN 박막 성장 및 플라즈마 발광 특성 분석 | ko |
| dc.title.alternative | Low-temperature growth of GaN thin films by remote plasma-enhanced metal-organic chemical vapor deposition and optical emission characterization of plasma | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 무기재료공학과 | - |
| dc.description.degree | Doctor | ko |
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