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원격플라즈마 유기금속화학증착법에 의한 저온 GaN 박막 성장 및 플라즈마 발광 특성 분석
Low-temperature growth of GaN thin films by remote plasma-enhanced metal-organic chemical vapor deposition and optical emission characterization of plasma

DC Field Value Language
dc.contributor.advisor윤의준-
dc.contributor.author손철수-
dc.date.accessioned2010-02-05T06:39:54Z-
dc.date.available2010-02-05T06:39:54Z-
dc.date.copyright1997.-
dc.date.issued1997-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079654kog
dc.identifier.urihttps://hdl.handle.net/10371/50785-
dc.description학위논문(박사)--서울대학교 대학원 :무기재료공학과,1997.ko
dc.format.extentxiv, 195 p.ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subjectGaNko
dc.subjectremote plasma-enhanced metal-organic chemical vapor depositionko
dc.subject원격플라즈마 유기금속화학증착법ko
dc.subjectoptical emission spectroscopyko
dc.subject광학발광분광법ko
dc.subjectlow temperature growthko
dc.subject저온 성장ko
dc.subjectGaN buffer layerko
dc.subject질소 플라즈마ko
dc.subjectnitrogen plasmako
dc.title원격플라즈마 유기금속화학증착법에 의한 저온 GaN 박막 성장 및 플라즈마 발광 특성 분석ko
dc.title.alternativeLow-temperature growth of GaN thin films by remote plasma-enhanced metal-organic chemical vapor deposition and optical emission characterization of plasmako
dc.typeThesis-
dc.contributor.department무기재료공학과-
dc.description.degreeDoctorko
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Ph.D. / Sc.D._재료공학부)
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