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유기실리콘 화합물원료를 이용한 단결정 탄화규소 박막성장 및 특성 연구 : Growth and characterization of heteroepitaxial β-SiC thin films using organosilicon precursor
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김형준 | - |
| dc.contributor.author | 방욱 | - |
| dc.date.accessioned | 2010-02-05T06:40:03Z | - |
| dc.date.available | 2010-02-05T06:40:03Z | - |
| dc.date.copyright | 1997. | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079075 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/50788 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1997. | ko |
| dc.format.extent | xiv, 201 p. | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | Silicon carbide(SiC) | ko |
| dc.subject | 탄화규소 | ko |
| dc.subject | thin film | ko |
| dc.subject | 박막 | ko |
| dc.subject | single crystalline | ko |
| dc.subject | 단결정 | ko |
| dc.subject | buffer layer | ko |
| dc.subject | 버퍼층 | ko |
| dc.subject | chemical vapor deposition(CVD) | ko |
| dc.subject | 화학기상증착법 | ko |
| dc.title | 유기실리콘 화합물원료를 이용한 단결정 탄화규소 박막성장 및 특성 연구 | ko |
| dc.title.alternative | Growth and characterization of heteroepitaxial β-SiC thin films using organosilicon precursor | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 무기재료공학과 | - |
| dc.description.degree | Doctor | ko |
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