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rf 마그네트론 동시 스퍼터링법에 의한 Pb(Zr,Ti)O₃박막의 증착 및 강유전 특성 : Preparation and ferroelectric properties of Pb(Zr,Ti)O₃thin films by rf magnetron cosputtering method
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- Authors
- Advisor
- 김형준
- Issue Date
- 1997
- Publisher
- 서울대학교 대학원
- Keywords
- rf cosputtering method ; rf 동시 스퍼터링법 ; PZT ; 우선배향성 ; prefered orientation ; 강유전 특성 ; ferroelectric property ; 피로 ; fatigue ; Pt 전극
- Description
- 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1997.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079069
https://hdl.handle.net/10371/50791
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