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rf 마그네트론 동시 스퍼터링법에 의한 Pb(Zr,Ti)O₃박막의 증착 및 강유전 특성 : Preparation and ferroelectric properties of Pb(Zr,Ti)O₃thin films by rf magnetron cosputtering method
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 김형준 | - |
dc.contributor.author | 홍석경 | - |
dc.date.accessioned | 2010-02-05T06:40:12Z | - |
dc.date.available | 2010-02-05T06:40:12Z | - |
dc.date.copyright | 1997. | - |
dc.date.issued | 1997 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079069 | kog |
dc.identifier.uri | https://hdl.handle.net/10371/50791 | - |
dc.description | 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1997. | ko |
dc.format.extent | xiii, 157 p. | ko |
dc.language.iso | ko | ko |
dc.publisher | 서울대학교 대학원 | ko |
dc.subject | rf cosputtering method | ko |
dc.subject | rf 동시 스퍼터링법 | ko |
dc.subject | PZT | ko |
dc.subject | 우선배향성 | ko |
dc.subject | prefered orientation | ko |
dc.subject | 강유전 특성 | ko |
dc.subject | ferroelectric property | ko |
dc.subject | 피로 | ko |
dc.subject | fatigue | ko |
dc.subject | Pt 전극 | ko |
dc.title | rf 마그네트론 동시 스퍼터링법에 의한 Pb(Zr,Ti)O₃박막의 증착 및 강유전 특성 | ko |
dc.title.alternative | Preparation and ferroelectric properties of Pb(Zr,Ti)O₃thin films by rf magnetron cosputtering method | ko |
dc.type | Thesis | - |
dc.contributor.department | 무기재료공학과 | - |
dc.description.degree | Doctor | ko |
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