Publications
Detailed Information
고주파 마그네트론 스퍼터링법에 의한 ZnO 박막의 증착 및 표면탄성파 필터의 응용 : Deposition of ZnO thin films by rf magnetron sputtering and its application to SAW filters
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 김형준
- Issue Date
- 1996
- Publisher
- 서울대학교 대학원
- Keywords
- 고주파 마그네트론 스퍼터링 ; ZnO ; 높은 에너지 입자 충돌 ; rf magnetron sputtering ; 우선배향성 ; highly energntic species bombardment ; 입사각 ; preferred orientation ; 표면탄성파 필터 ; incident angle
- Description
- 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1996.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000082722
https://hdl.handle.net/10371/50796
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.