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패터닝된 基板에서의 구리 電氣 鍍金層의 두께와 形象에 關한 硏究 : The Study on the thickness and the shape of the Cu electrodeposit with the patterned substrate

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dc.contributor.advisor강탁-
dc.contributor.author김남석-
dc.date.accessioned2010-02-05T06:42:02Z-
dc.date.available2010-02-05T06:42:02Z-
dc.date.copyright1996.-
dc.date.issued1996-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000081542kog
dc.identifier.urihttps://hdl.handle.net/10371/50826-
dc.description학위논문(박사)--서울大學校 大學院 :金屬工學科,1996.ko
dc.format.extentxi, 126 장ko
dc.language.isokoko
dc.publisher서울大學校 大學院ko
dc.subject쓰루 마스크 도금ko
dc.subjectthrough-mask platingko
dc.subject경계 요소법ko
dc.subjectboundary element methodko
dc.subject불균일성 인자ko
dc.subjectuniformity factorko
dc.subject전류 분산 효과ko
dc.subjectcurrent diverge effectko
dc.subject분극 기울기ko
dc.subjectpolarization slopeko
dc.title패터닝된 基板에서의 구리 電氣 鍍金層의 두께와 形象에 關한 硏究ko
dc.title.alternativeThe Study on the thickness and the shape of the Cu electrodeposit with the patterned substrateko
dc.typeThesis-
dc.contributor.department金屬工學科-
dc.description.degreeDoctorko
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