Publications
Detailed Information
Effects of dry etching on the magnetic properties of permalloy (Ni81Fe19) thin films : 건식에칭이 퍼말로이 (Ni81Fe19) 박막의 자기적 특성에 미치는 영향
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이정중 | - |
| dc.contributor.author | 김성동 | - |
| dc.date.accessioned | 2010-02-05T06:42:37Z | - |
| dc.date.available | 2010-02-05T06:42:37Z | - |
| dc.date.copyright | 1998. | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000076342 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/50838 | - |
| dc.description | Thesis (doctoral)--서울대학교 대학원 :금속공학과,1998. | en |
| dc.format.extent | viii, 94 p. | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | 퍼말로이 박막 | en |
| dc.subject | permalloy thin films | en |
| dc.subject | 이온빔 에칭 | en |
| dc.subject | ion beam etching | en |
| dc.subject | 반응성 이온 에칭 | en |
| dc.subject | reactive ion stching | en |
| dc.subject | 에칭 손상 | en |
| dc.subject | etching damage | en |
| dc.subject | 표면 거칠기 | en |
| dc.subject | surface roughness | en |
| dc.title | Effects of dry etching on the magnetic properties of permalloy (Ni81Fe19) thin films | en |
| dc.title.alternative | 건식에칭이 퍼말로이 (Ni81Fe19) 박막의 자기적 특성에 미치는 영향 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 금속공학과 | - |
| dc.description.degree | Doctor | en |
- Appears in Collections:
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.