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CVD 다이아몬드 성장의 기체 및 표면 반응속도에 관한 연구 : Gas phase and surface reaction kinetics of CVD diamond growth

DC Field Value Language
dc.contributor.advisor강탁-
dc.contributor.author박순-
dc.date.accessioned2010-02-05T06:44:11Z-
dc.date.available2010-02-05T06:44:11Z-
dc.date.copyright1996.-
dc.date.issued1996-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000081620kog
dc.identifier.urihttps://hdl.handle.net/10371/50869-
dc.description학위논문(박사)--서울대학교 대학원 :금속공학과,1996.ko
dc.format.extentxiii, 125 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subject다이아몬드ko
dc.subjectHFCVDko
dc.subject화학증착법ko
dc.subject반응속도론ko
dc.subject수치모사ko
dc.titleCVD 다이아몬드 성장의 기체 및 표면 반응속도에 관한 연구ko
dc.title.alternativeGas phase and surface reaction kinetics of CVD diamond growthko
dc.typeThesis-
dc.contributor.department금속공학과-
dc.description.degreeDoctorko
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