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동시 스퍼터링법에 의한 강유전체 기억소자용 PZT와 BST 박막 제조 및 특성 향상에 관한 연구 : A Study on the fabrication and improvement of PZT and BST thin films for the ferroelectric memory devices by co-sputtering method
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 주승기 | - |
| dc.contributor.author | 주재현 | - |
| dc.date.accessioned | 2010-02-05T06:44:21Z | - |
| dc.date.available | 2010-02-05T06:44:21Z | - |
| dc.date.copyright | 1996. | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000081555 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/50872 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :금속공학과,1996. | ko |
| dc.format.extent | xi, 137 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 동시 스퍼터링 | ko |
| dc.subject | PZT | ko |
| dc.subject | 강유전체 | ko |
| dc.subject | BST | ko |
| dc.subject | 기억소자 | ko |
| dc.subject | co-sputtering | ko |
| dc.subject | 상변태 | ko |
| dc.subject | ferroelectric | ko |
| dc.subject | 전도기구 | ko |
| dc.subject | memory device | ko |
| dc.title | 동시 스퍼터링법에 의한 강유전체 기억소자용 PZT와 BST 박막 제조 및 특성 향상에 관한 연구 | ko |
| dc.title.alternative | A Study on the fabrication and improvement of PZT and BST thin films for the ferroelectric memory devices by co-sputtering method | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 금속공학과 | - |
| dc.description.degree | Doctor | ko |
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