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웨이퍼 단위로 실장된 단결정 실리콘 SP9T RF MEMS 스위치에 관한 연구 : (A)Study on wafer-level packaged single crystalline silicon single-pole nine-throw RF MEMS switch
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- Authors
- Advisor
- 김용권
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- SP9T RF MEMS 스위치 ; SP9T RF MEMS switch ; 단결정 실리콘 ; single crystalline silicon ; 구조물 변형 ; structural deformation ; 저전압 구동 ; low voltage actuation ; 균일성 ; uniformity ; 웨이퍼 단위 실장 ; wafer-level packaging
- Description
- 학위논문(박사)--서울대학교 대학원 :전기·컴퓨터공학부,2007.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045198
https://hdl.handle.net/10371/51593
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