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Browsing by Subject cubic silicon carbide (SiC)

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Issue Date Title / Author(s) / CitationFile
2001
Low-Temperature Epitaxial Growth of Cubic Silicon Carbide on Si(100) for Submicron-pattern Fabrications

An, Sung-Jae; Yi, Gyu-Chul

Jpn. J. Appl. Phys. 40 (2001) 1379

DOI
1
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