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Effect of Pore Generating Materials on the Electrical and Mechanical Properties of Porous Low-k Films

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dc.contributor.authorKim, Suhan-
dc.contributor.authorChar, Kookheon-
dc.contributor.authorHahn, Junhee-
dc.contributor.authorLee, Jin-Kyu-
dc.contributor.authorYoon, Do Yeung-
dc.contributor.authorRhee, Hee-Woo-
dc.contributor.authorJin, Moon Young-
dc.date.accessioned2009-07-29T08:22:53Z-
dc.date.available2009-07-29T08:22:53Z-
dc.date.issued2007-
dc.identifier.citationMacromol. Res., 15, 1 (2007)en
dc.identifier.issn1598-5032-
dc.identifier.urihttp://kiss.kstudy.com/search/detail_view.asp?key=2595137-
dc.identifier.urihttps://hdl.handle.net/10371/5881-
dc.description.sponsorshipThis work is supported by the NANO Systems Institute-National Core Research Center(NSI-NCRC) from the Korea Science and Engineering Foundation (KOSEF) and System IC 2010 Project of Korea Ministry of Commerce, Industry and Energy. Financial supports from the Ministry of Science and Technology (MOST) and the Korean Ministry of Education through the National Research Laboratory Fund and the Brain Korea 21 Program are also greatly acknowlewdged.en
dc.language.isoen-
dc.publisher한국고분자학회 = The Polymer Society of Koreaen
dc.titleEffect of Pore Generating Materials on the Electrical and Mechanical Properties of Porous Low-k Filmsen
dc.typeArticleen
dc.contributor.AlternativeAuthor김수한-
dc.contributor.AlternativeAuthor차국헌-
dc.contributor.AlternativeAuthor한준희-
dc.contributor.AlternativeAuthor이진규-
dc.contributor.AlternativeAuthor윤도영-
dc.contributor.AlternativeAuthor이희우-
dc.contributor.AlternativeAuthor진문영-
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