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A Study on Thermal Stability of CoSi2 Employing Novel Fine-Grained Polycrystalline Silicon/CoSi2/Si(001) System
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Bae, Jong-Uk | - |
dc.contributor.author | Sohn, Dong Kyun | - |
dc.contributor.author | Park, Ji-Soo | - |
dc.contributor.author | Han, Chang Hee | - |
dc.contributor.author | Park, Jin Won | - |
dc.contributor.author | Kim, Yeong-Cheol | - |
dc.contributor.author | Kim, Jae Jeong | - |
dc.date.accessioned | 2010-04-15T07:17:03Z | - |
dc.date.available | 2010-04-15T07:17:03Z | - |
dc.date.issued | 2001-11-15 | - |
dc.identifier.citation | Japanese Journal of Applied Physics 40 (2001) 6307-6310 | en |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | https://hdl.handle.net/10371/63261 | - |
dc.description.abstract | The cobalt silicide/fine-grained polycrystalline silicon (poly-Si) structure has been employed as gate electrodes in silicon-based very large-scale integration circuits. We have constructed a novel fine-grained poly-Si/cobalt silicide/silicon (001) structure to investigate the thermal stability of cobalt silicide at elevated temperatures. The dissociated cobalt atoms are observed to diffuse from fine-grained poly-Si/cobalt silicide and cobalt silicide/silicon (001) interfaces into the fine-grained poly-Si layer through poly-Si grain boundaries and the bulk cobalt silicide layer. The dissociated Si atoms at the cobalt silicide/silicon (001) interface are observed to grow epitaxilly on the silicon (001) substrate. This observation is consistent with previous results for circuits that employed amorphous Si instead of fine-grained poly-Si. | en |
dc.language.iso | en | en |
dc.publisher | Japan Society of Applied Physics | en |
dc.title | A Study on Thermal Stability of CoSi2 Employing Novel Fine-Grained Polycrystalline Silicon/CoSi2/Si(001) System | en |
dc.type | Article | en |
dc.contributor.AlternativeAuthor | 배종욱 | - |
dc.contributor.AlternativeAuthor | 손동균 | - |
dc.contributor.AlternativeAuthor | 박지수 | - |
dc.contributor.AlternativeAuthor | 한창희 | - |
dc.contributor.AlternativeAuthor | 박진원 | - |
dc.contributor.AlternativeAuthor | 김영철 | - |
dc.contributor.AlternativeAuthor | 김재정 | - |
dc.identifier.doi | 10.1143/JJAP.40.6307 | - |
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