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Showing results 1 to 7 of 7

Issue DateTitle / Author(s) / CitationFileAltmetrics
2009-12
A virtual metrology system for semiconductor manufacturing

Kang, Pilsung; Lee, Hyoung-joo; Cho, Sungzoon; Kim, Dongil; Park, Chan-Kyoo; Doh, Seungyong; Park, Jinwoo

EXPERT SYSTEMS WITH APPLICATIONS; Vol.36 10; 12554-12561

DOI
2010
Locally linear reconstruction for prediction, detection, clustering : algorithms and their applications
link
2011-03
Virtual metrology for run-to-run control in semiconductor manufacturing

Kang, Pilsung; Kim, Dongil; Lee, Hyoung-joo; Doh, Seungyong; Cho, Sungzoon

EXPERT SYSTEMS WITH APPLICATIONS; Vol.38 3; 2508-2522

DOI
2016-06
Semi-supervised support vector regression based on self-training with label uncertainty: An application to virtual metrology in semiconductor manufacturing

Kang, Pilsung; Kim, Dongil; Cho, Sungzoon

Expert Systems with Applications, Vol.51, pp.85-106

DOI
2016-11
Efficient Feature Selection-Based on Random Forward Search for Virtual Metrology Modeling

Kang, Seokho; Kim, Dongil; Cho, Sungzoon

IEEE Transactions on Semiconductor Manufacturing, Vol.29 No.4, pp.391-398

DOI
2017-07
Virtual metrology for copper-clad laminate manufacturing

Kim, Misuk; Kang, Seokho; Lee, Jehyuk; Cho, Hyunchang; Cho, Sungzoon; Park, Jee Su

Computers and Industrial Engineering, Vol.109, pp.280-287

DOI
2022-04
Plasma information-based virtual metrology (PI-VM) and mass production process control
DOI
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