(A) study on the instability of porous low-k dielectric in cu interconnect

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(A) study on the instability of porous low-k dielectric in cu interconnect : 다공성 저유전상수 물질의 열적 안정성 연구

DC Field	Value	Language
dc.contributor.advisor	오규환	-
dc.contributor.author	강석훈	-
dc.date.accessioned	2010-05-04T04:46:36Z	-
dc.date.available	2010-05-04T04:46:36Z	-
dc.date.copyright	2010	-
dc.date.issued	2010	-
dc.identifier.uri	http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000032457	eng
dc.identifier.uri	https://hdl.handle.net/10371/63874	-
dc.description	Thesis(doctors) --서울대학교 대학원 :재료공학부,2010.2.	en
dc.format.extent	xi, 122 leaves	en
dc.language.iso	en	en
dc.publisher	서울대학교 대학원	en
dc.subject	저유전상수 물질	en
dc.subject	porous low-k dielectric material	en
dc.subject	구리 배선	en
dc.subject	interconnect	en
dc.subject	다공성	en
dc.subject	porosity	en
dc.subject	열응력	en
dc.subject	thermal stress	en
dc.subject	탄성계수	en
dc.subject	Youngs modulus	en
dc.subject	열분해	en
dc.subject	thermal decomposition	en
dc.subject	수축	en
dc.subject	SiCOH	en
dc.subject	기공	en
dc.subject	MSSQ	en
dc.subject	구리 배선 밀도	en
dc.subject	FTIR	en
dc.subject	kinetics	en
dc.subject	contraction	en
dc.subject	voiding	en
dc.subject	Cu pattern density	en
dc.subject	blanket film	en
dc.subject	cross-links	en
dc.title	(A) study on the instability of porous low-k dielectric in cu interconnect	en
dc.title.alternative	다공성 저유전상수 물질의 열적 안정성 연구	en
dc.type	Thesis	-
dc.contributor.department	재료공학부	-
dc.description.degree	Doctor	en

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