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Silicon thin-fin etching using chemical dry etching
화학적 건식 식각을 이용한 실리콘의 얇은 핀 식각

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Authors
Rehman Ateeq-Ur
Advisor
박병국
Issue Date
2010
Publisher
서울대학교 대학원
Keywords
플라즈마Plasma화학건식식각Chemical dry etching등방성 식각Isotropic etching선택비selectivity플래시 메모리Flash memory
Description
Thesis(masters) --서울대학교 대학원 :전기. 컴퓨터공학부,2010.2.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000033520

http://hdl.handle.net/10371/64972
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Master's Degree_전기·정보공학부)
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