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Browsing by Subject integrated circuit metallisation

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Showing results 1 to 2 of 2

Issue Date Title / Author(s) / CitationFile
2002

Kim, Jae Jeong; Kim, Soo-Kil; Lee, Chang Hwa; Kim, Yong Shik

The Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures 21, 33-38

DOI
2003

Kim, Jae Jeong; Kim, Soo-Kil; Kim, Yong Shik

Journal of the Electrochemical Society, 151, C97-C101

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1

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