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Superfilling Evolution in Cu Electrodeposition; Dependence on the Aging Time of the Accelerator

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dc.contributor.authorKim, Soo-Kil-
dc.contributor.authorKim, Jae Jeong-
dc.date.accessioned2010-05-14T05:45:23Z-
dc.date.available2010-05-14T05:45:23Z-
dc.date.issued2004-08-04-
dc.identifier.citationElectrochemical and Solid-State Letters, 7 (9), C98-C100en
dc.identifier.issn1099-0062-
dc.identifier.urihttps://hdl.handle.net/10371/66132-
dc.description.abstractInteresting phenomena were observed during an investigation on the accelerating effects of 3-mercapto-1-propane sulfonic acid
~MPSA!, i.e., different aging times of MPSA result in different filling profiles. When MPSA was added to the electrolyte
immediately before electrodeposition, subconformal deposits appeared, whereas MPSA aged over 12 h enabled superfilling. From
UV-visible analysis, over 99% MPSA was converted to bis~3-sulfopropyl!disulfide ~SPS! within 12 h through the reaction with
Cu21, which means that SPS was, in terms of visible superfilling, the real accelerator. This arose from the fact that SPS
experienced adsorption first, while MPSA underwent Cu21 reduction first at the trench entrance.
en
dc.language.isoenen
dc.publisherElectrochemical Societyen
dc.subjectcopperen
dc.subjectelectrodepositionen
dc.subjectageingen
dc.subjectorganic compoundsen
dc.subjectelectrolytesen
dc.subjectultraviolet spectraen
dc.subjectvisible spectraen
dc.titleSuperfilling Evolution in Cu Electrodeposition; Dependence on the Aging Time of the Acceleratoren
dc.typeArticleen
dc.contributor.AlternativeAuthor김수길-
dc.contributor.AlternativeAuthor김재정-
dc.identifier.doi10.1149/1.1777552-
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Chemical and Biological Engineering (화학생물공학부)Journal Papers (저널논문_화학생물공학부)
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