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Issue DateTitle / Author(s) / CitationFileAltmetrics
2011-03
Virtual metrology for run-to-run control in semiconductor manufacturing

Kang, Pilsung; Kim, Dongil; Lee, Hyoung-joo; Doh, Seungyong; Cho, Sungzoon

EXPERT SYSTEMS WITH APPLICATIONS; Vol.38 3; 2508-2522

DOI
1