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Area selectivity of InGaAsP-InP multiquantum-well intermixing by impurity-free vacancy diffusion

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dc.contributor.authorSi, Sang Kee-
dc.contributor.authorYeo, Deok Ho-
dc.contributor.authorYoon, Kyung Hun-
dc.contributor.authorKim, Sung June-
dc.date.accessioned2009-09-07T23:43:44Z-
dc.date.available2009-09-07T23:43:44Z-
dc.date.issued1998-07-
dc.identifier.citationIEEE J. Sel. Top. Quant., vol. 4, pp. 619-623, 1998en
dc.identifier.issn1077-260X-
dc.identifier.urihttps://hdl.handle.net/10371/8869-
dc.description.abstractArea selectivity of bandgap tuning in the InGaAsPInP
multiquantum-well structure has been investigated using low
temperature photoluminescence (PL). The bandgap blue-shift in
the intermixed region was as much as 170 meV for a rapid thermal
annealer anneal of 30 s at 850 C, and was controllable using
annealing temperature and time. From samples with SiO2 stripe
patterns, clearly separated PL peaks were observed centered at
0.95 and 1.08 eV, each representing signals originating from the
dielectric capped and exposed areas, respectively. In samples with
stripes intervals less than 6 m, PL signals did not separate, but
formed one broad spectrum due to lateral diffusion. The lateral
diffusion was found less than 3.0 m.
en
dc.description.sponsorshipThis work
was supported in part by Korea Telecom Switching Technology Research
under Grant 970124 and in part by the Institute of Information Technology
Assessment under Grant 97-NF-02-14-a-01.
en
dc.language.isoen-
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.subjectArea selectivityen
dc.subjectbandgap tuningen
dc.subjectimpurity-free vacancy diffusion (IFVD)en
dc.subjectInGaAsP–InP multiquantum-well (MQW) structuresen
dc.subjectlateral diffusion coefficienten
dc.subjectquantum-well intermixingen
dc.titleArea selectivity of InGaAsP-InP multiquantum-well intermixing by impurity-free vacancy diffusionen
dc.typeArticleen
dc.contributor.AlternativeAuthor시상기-
dc.contributor.AlternativeAuthor여덕호-
dc.contributor.AlternativeAuthor윤경훈-
dc.contributor.AlternativeAuthor김성준-
dc.identifier.doi10.1109/2944.720471-
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Journal Papers (저널논문_전기·정보공학부)
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