Low Temperature Photoluminescence Characteristics of Zn-doped InP Grown by Metalorganic Chemical Vapor Deposition

Abstract

Zn-doped InP layers were obtained by two different doping techniques: in situ doping by low pressure metalorganic chemical vapor deposition, and thermal diffusion from a Zn-containing film. Their low temperature photoluminescence ~PL! characteristics were studied, and compared. In Zn-diffused InP, the deep donor to acceptor transition was the most dominant transition and other transitions such as the band edge transition and the band to band or shallow donor to acceptor transition were not observed at the excitation power of 10 mW. On the other hand, well resolved band edge peaks and the band or shallow donor to acceptor transition peak were observed for in situ Zn doped InP, implying that less interstitial Zn atoms were generated during in situ doping. Saturation of the hole concentration at 1.531018 cm3 was observed in in situ Zn doped InP, and the changes in PL characteristics at the saturation level were extensively studied. Two new deep bands at 0.88–1.0 eV and 1.21–1.27 eV were observed, and the intensity of the lower energy band increased with diethylzinc flow rate. The lower energy band was observed even at room temperature, and it is presumed to be related with the saturation of hole concentration.