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Large-Area Dual-Scale Metal Transfer by Adhesive Force

Cited 34 time in Web of Science Cited 34 time in Scopus
Authors

Kwak, Moon Kyu; Kim, Tae-il; Kim, Pilnam; Lee, Hong H.; Suh, Kahp Y.

Issue Date
2009-04-20
Publisher
Wiley-Blackwell
Citation
Small 2009, 5, 928
Keywords
adhesionmetal transferpattern transferpolarizersLIGHT-EMITTING-DIODESNANOIMPRINT LITHOGRAPHYNANOLITHOGRAPHYFABRICATION
Abstract
A dual-scale metal transfer technique is presented to generate metal patterns with two different length scales from a single master. An adhesive polymer layer is brought in contact with the metal-coated surface in two sequential steps to transfer metal layers from both ridges and valleys of the mold aided by the difference in adhesive force (see image).
ISSN
1613-6810
Language
English
URI
https://hdl.handle.net/10371/9544
DOI
https://doi.org/10.1002/smll.200801262
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