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Issue Date	Title / Author(s) / Citation	File	Altmetrics
2021-06	Mask-substrate gap control system for exposure equipment Jung, Raehun; Yoon, Joanne; Shin, Buhyun; Ryu, Sang-Gil; Ye, Sung-Joon; Bang, Young-bong Microsystem Technologies, Vol.27 No.6, pp.2395-2406	DOI