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Plasma characteristics for various driving RF frequencies of inductively coupled plasma
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 황용석 | - |
| dc.contributor.author | 박동희 | - |
| dc.date.accessioned | 2009-11-17 | - |
| dc.date.available | 2009-11-17 | - |
| dc.date.copyright | 2006. | - |
| dc.date.issued | 2006 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047446 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/12278 | - |
| dc.description | Thesis(master`s)--서울대학교 대학원 :원자핵공학과,2006. | eng |
| dc.format.extent | i, vi, 61 leaves | eng |
| dc.language.iso | en | eng |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 유도결합플라즈마 | eng |
| dc.subject | Inductively coupled plasma | eng |
| dc.subject | 전자 가열 효율 | eng |
| dc.subject | Coupling Efficiency | eng |
| dc.subject | E-H 변이 | eng |
| dc.subject | E-H transition | eng |
| dc.subject | 플라즈마 특성 | eng |
| dc.subject | Plasma Characteristics | eng |
| dc.subject | Threshold 전자밀도 | eng |
| dc.subject | Threshold density | eng |
| dc.subject | Bulk 및 High tail 전자 | eng |
| dc.subject | Bulk and high tail electron | eng |
| dc.title | Plasma characteristics for various driving RF frequencies of inductively coupled plasma | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 원자핵공학과 | - |
| dc.description.degree | Master | eng |
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