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Two-dimensional Forward Optical Scanner using Glass Microlens Pre-assembled Substrate : 유리 미소렌즈가 미리 결합된 기판을 이용한 2차원 전방 광 스캐너
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 김용권 | - |
dc.contributor.author | Sunghyun Yoo | - |
dc.date.accessioned | 2017-07-14T02:48:04Z | - |
dc.date.available | 2017-07-14T02:48:04Z | - |
dc.date.issued | 2012-08 | - |
dc.identifier.other | 000000005204 | - |
dc.identifier.uri | https://hdl.handle.net/10371/122907 | - |
dc.description | 학위논문 (석사)-- 서울대학교 대학원 : 전기·컴퓨터공학부, 2012. 8. 김용권. | - |
dc.description.abstract | A miniaturized two-dimensional forward optical scanner is designed and fabricated in 2.26×1.97×0.62 mm3-size for endoscopic imaging through MEMS technology.
Firstly, glass microlens pre-assembled substrate is newly proposed to address the long-time-period bottleneck in microlens-integrated devices, that is, the complicated manual assembly process. It is a silicon substrate with embedded microlens array fabricated via twice of thermal reflows at 850 ˚C. As with a silicon-on-insulator (SOI) substrate, it can be utilized as the base substrate for implementing various microlens-optical components including actuators and collimator array. As a fundamental experiment, microlenses with diameter range from 30 μm to 50 μm are successfully fabricated within less than 1% error with the designed radius of curvature. Dual-axis lateral resonator is designed with single-layer stage-in-the-stage structure and isolated electrodes via glass isolation blocks. Six isolation blocks are integrated in the inner frame structure through thermal reflow process, simultaneously with the fabrication of microlens. Glass microlens of 400 μm-diameter is successfully fabricated for forward optical scanner. The microlens have high consistent with the expected surface profile. Average roughness of the microlens surface is measured 22 nm. Dynamic characteristics are measured in atmospheric pressure. Resonant frequency of the stage in X and Y axis are 3.238 kHz and 2.198 kHz, respectively. Relevant quality factor is 168 and 69.1, respectively. More than 40 μm lateral displacements are achieved in both axes, when 21 V is applied, in resonant mode. Demonstration of beam steering has successfully proven the applicability of the proposed microlens fabrication and assembly method. Measured tilting angle of the beam in X and Y direction are approximately ±4.9˚ and ±4.7˚ at resonance, at a beam diameter of 2.0 mm. | - |
dc.description.tableofcontents | Contents
________________________________________ Abstract i Contents iii List of Figures vi List of Tables ix Contents Chapter 1 Introduction 1 1.1 Background 1 1.2 Forward optical scanner 3 1.2.1 Conventional micromachining 3 1.2.2 MEMS technology 4 1.3 Purpose of the research 6 1.4 Layout of the paper 7 Chapter 2 Glass microlens pre-assembled substrate 8 2.1 Introduction 8 2.1 Design 9 2.3 Fabrication 12 2.4 Measurement 13 2.4 Summary 18 Chapter 3 Design 19 3.1 Theory: Geometrical optics 19 3.2 Overall design 22 3.3 Movable XY-stage with glass isolation blocks 24 3.3.1 Design specification 24 3.3.2 Constants 25 3.3.3 Mathematical modeling 26 3.3.4 COMSOL simulation 28 3.4 Microlens 30 Chapter 4 Fabrication 31 4.1 Overall process 31 4.2 Fabrication results 33 4.2.1 Microlens 33 4.2.2 XY-stage 38 Chapter 5 Experiment 42 5.1 PCB mount 42 5.2 Dynamic response 44 5.2.1 Experimental setup 45 5.2.2 Frequency response 44 5.2.3 Lateral displacement 48 5.3 Optical demonstration 50 5.3.1 Experimental setup 50 5.3.2 Results 51 Chapter 6 Conclusion 52 Bibliography 54 Abstract (Korean) 57 Acknowledgement (Korean) 59 | - |
dc.format | application/pdf | - |
dc.format.extent | 9721030 bytes | - |
dc.format.medium | application/pdf | - |
dc.language.iso | en | - |
dc.publisher | 서울대학교 대학원 | - |
dc.subject | glass microlens | - |
dc.subject | thermal reflow | - |
dc.subject | optical scanner | - |
dc.subject | microlens assembly | - |
dc.subject | isolation block | - |
dc.subject | endoscopic imaging | - |
dc.title | Two-dimensional Forward Optical Scanner using Glass Microlens Pre-assembled Substrate | - |
dc.title.alternative | 유리 미소렌즈가 미리 결합된 기판을 이용한 2차원 전방 광 스캐너 | - |
dc.type | Thesis | - |
dc.contributor.AlternativeAuthor | 유승현 | - |
dc.description.degree | Master | - |
dc.citation.pages | ix, 60 | - |
dc.contributor.affiliation | 공과대학 전기·컴퓨터공학부 | - |
dc.date.awarded | 2012-08 | - |
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