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유도결합 플라즈마를 이용한 플라스틱 기판 상의 투명전도성 ZnO:Al 박막 증착 공정 연구 : Al doped zinc oxide films on the plastic substrate by inductively coupled plasma assisted sputtering
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- Authors
- Advisor
- 이정중
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- Al doped ZnO ; Al doped ZnO ; ICP ; ICP ; 유도결합 플라즈마 ; inductively coupled plasma ; 타겟 전압 조절법 ; target voltage control ; 저온 증착 ; low temperature deposition ; 플라스틱 기판 ; plastic substrate
- Description
- 학위논문(박사)--서울대학교 대학원 :재료공학부,2006.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000048697
https://hdl.handle.net/10371/12623
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