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Low temperature growth of carbon nano-tubes by internal type inductively coupled plasma assisted chemical vapor deposition : 내부형 유도결합 플라즈마 화학 기상 증착법을 이용한 카본나노튜브의 저온공정에 관한 연구
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- Authors
- Advisor
- 이정중
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- 탄소나노튜브 ; carbon nano-tube(CNT) ; 저온공정 ; low temperature ; 유도결합플라즈마 ; inductively coupled plasma(ICP) ; 화학기상증착법 ; PECVD ; 스퍼터링 ; ICP assisted sputtering
- Description
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2006.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000046490
https://hdl.handle.net/10371/12640
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