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Atomic layer deposition and characterization of SrTiO3 thin films : 단원자층 증착법으로 증착된 SrTiO₃박막의 증착 특성 및 물성 평가
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- Authors
- Advisor
- 황철성
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- high-k ; SrTiO3 ; ALD ; precursors ; oxidant ; DRAM ; tox ; self-limiting mechanism
- Description
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2006.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000046479
https://hdl.handle.net/10371/12651
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