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Degradation analysis of MEMS device under cyclic loading for reliability-aided design : 신뢰성 기반 설계를 위한 MEMS 소자의 반복구동에 따른 열화 해석

DC Field Value Language
dc.contributor.advisor권동일-
dc.contributor.author김종진-
dc.date.accessioned2009-11-18-
dc.date.available2009-11-18-
dc.date.copyright2005.-
dc.date.issued2005-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052252eng
dc.identifier.urihttps://hdl.handle.net/10371/12696-
dc.descriptionThesis(doctoral)--서울대학교 대학원 :재료공학부,2005.eng
dc.format.extentx, 166 leaveseng
dc.language.isoeneng
dc.publisher서울대학교 대학원eng
dc.subjectMEMSeng
dc.subjectmicroelectromechanical systems (MEMS)eng
dc.subject신뢰성eng
dc.subjectreliabilityeng
dc.subject열화eng
dc.subjectdegradationeng
dc.subject반복구동eng
dc.subjectcyclic loadingeng
dc.subject고장물리eng
dc.subjectphysics-of-failureeng
dc.subject신뢰성통계eng
dc.subjectreliability statisticseng
dc.subject실리콘eng
dc.subjectsiliconeng
dc.subject니켈eng
dc.subjectnickeleng
dc.titleDegradation analysis of MEMS device under cyclic loading for reliability-aided designeng
dc.title.alternative신뢰성 기반 설계를 위한 MEMS 소자의 반복구동에 따른 열화 해석eng
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeDoctoreng
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