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(The)Redox reaction in Cu oxide formation and the in-situ formation of capping layer in Cu CMP : 구리 화학적 기계적 연마 중 구리 산화막 형성 및 캡핑막 형성 관련 산화 환원 반응

DC Field Value Language
dc.contributor.advisor김재정-
dc.contributor.author강민철-
dc.date.accessioned2009-11-18T05:02:44Z-
dc.date.available2009-11-18T05:02:44Z-
dc.date.copyright2008.-
dc.date.issued2008-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041637eng
dc.identifier.urihttps://hdl.handle.net/10371/13009-
dc.descriptionThesis(doctors) --서울대학교 대학원 :화학생물공학부, 2008.8.eng
dc.format.extentx, 107 leaveseng
dc.language.isoen-
dc.publisher서울대학교 대학원eng
dc.subjectCueng
dc.subject구리eng
dc.subjectinterconnectioneng
dc.subject배선eng
dc.subjectCMPeng
dc.subjectCMPeng
dc.subjectoxidizereng
dc.subject산화제eng
dc.subjectcomplexing agenteng
dc.subject착물형성제eng
dc.subjectOH 라디칼eng
dc.subjectOH radicaleng
dc.subject갈산eng
dc.subjectgallic acideng
dc.subject치환반응eng
dc.subjectAg displacementeng
dc.subjectAg 캡핑막eng
dc.subjectcapping layereng
dc.title(The)Redox reaction in Cu oxide formation and the in-situ formation of capping layer in Cu CMPeng
dc.title.alternative구리 화학적 기계적 연마 중 구리 산화막 형성 및 캡핑막 형성 관련 산화 환원 반응eng
dc.typeThesis-
dc.contributor.department화학생물공학부-
dc.description.degreeDoctoreng
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