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Preparation and application of photoimageable bottom antireflective coating
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 조재영 | - |
| dc.contributor.author | 권기옥 | - |
| dc.date.accessioned | 2009-11-18T08:03:39Z | - |
| dc.date.available | 2009-11-18T08:03:39Z | - |
| dc.date.copyright | 2006. | - |
| dc.date.issued | 2006 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047850 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/13454 | - |
| dc.description | Thesis(master`s)--서울대학교 대학원 :화학생물공학부,2006. | eng |
| dc.format.extent | vi, 45 leaves | eng |
| dc.language.iso | en | eng |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 하부 반사 방지막; 안트라센; 분해성 가교제; 리소그래피 | eng |
| dc.subject | bottom antireflective coating; anthracene; degradable crosslinker; lithography | eng |
| dc.title | Preparation and application of photoimageable bottom antireflective coating | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 화학생물공학부 | - |
| dc.description.degree | Master | eng |
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