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열 필라멘트 법에 의한 박막 증착에서의 바이어스 효과 : Effects of the electric bias on the deposition of films by hot-wire chemical vapor deposition
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 황농문 | - |
dc.contributor.author | 이재익 | - |
dc.date.accessioned | 2009-11-18T22:17:17Z | - |
dc.date.available | 2009-11-18T22:17:17Z | - |
dc.date.copyright | 2008. | - |
dc.date.issued | 2008 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041539 | eng |
dc.identifier.uri | https://hdl.handle.net/10371/13509 | - |
dc.description | Thesis(doctors) --서울대학교 대학원 :재료공학부,2008.8. | eng |
dc.format.extent | x, 139 leaves. | eng |
dc.language.iso | en | eng |
dc.publisher | 서울대학교 대학원 | eng |
dc.subject | 바이어스 효과 | eng |
dc.subject | Bias Effects | eng |
dc.subject | 기판 바이어스 | eng |
dc.subject | Substrate Bias | eng |
dc.subject | 열 필라멘트법 | eng |
dc.subject | Hot-wire CVD | eng |
dc.subject | 하전된 나노입자 | eng |
dc.subject | Charged nanoparticles | eng |
dc.subject | 실리콘 박막 | eng |
dc.subject | Silicon Thin Film | eng |
dc.subject | 박막 태양전지. | eng |
dc.subject | Thin Film Solar Cells | eng |
dc.title | 열 필라멘트 법에 의한 박막 증착에서의 바이어스 효과 | eng |
dc.title.alternative | Effects of the electric bias on the deposition of films by hot-wire chemical vapor deposition | eng |
dc.type | Thesis | - |
dc.contributor.department | 재료공학부 | - |
dc.description.degree | Doctor | eng |
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