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ALD(Atomic Layer Deposition) 증착법을 이용한 Bi2(Ti2-xSix)O7-y 유전박막의 증착 거동 및 물성 평가에 관한 연구 : Growth mechanism and characteristics of Bi2(Ti2-xSix)O7-y deposited by atomic layer deposition
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 황철성 | - |
dc.contributor.author | 김완돈 | - |
dc.date.accessioned | 2009-11-24T02:55:03Z | - |
dc.date.available | 2009-11-24T02:55:03Z | - |
dc.date.copyright | 2005. | - |
dc.date.issued | 2005 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051038 | kor |
dc.identifier.uri | https://hdl.handle.net/10371/14282 | - |
dc.description | 학위논문(석사)--서울대학교 대학원 :재료공학부,2005. | kor |
dc.format.extent | xiv, 174 p. | kor |
dc.language.iso | ko | - |
dc.publisher | 서울대학교 대학원 | kor |
dc.subject | Bi2(Ti2-xSix)O7-y (BTSO) | kor |
dc.subject | Bi2(Ti2-xSix)O7-y (BTSO) | kor |
dc.subject | Bi-Ti-O (BTO) | kor |
dc.subject | Bi-Ti-O (BTO) | kor |
dc.subject | 커패시터 | kor |
dc.subject | capacitor | kor |
dc.subject | ALD | kor |
dc.subject | ALD | kor |
dc.subject | 고유전재료 | kor |
dc.subject | dielectric constant | kor |
dc.subject | 유전율 | kor |
dc.subject | leakage current density | kor |
dc.subject | 전극 | kor |
dc.subject | composition ratio | kor |
dc.subject | 조성비 | kor |
dc.subject | 누설 전류 특성 | kor |
dc.subject | DRAM | kor |
dc.title | ALD(Atomic Layer Deposition) 증착법을 이용한 Bi2(Ti2-xSix)O7-y 유전박막의 증착 거동 및 물성 평가에 관한 연구 | kor |
dc.title.alternative | Growth mechanism and characteristics of Bi2(Ti2-xSix)O7-y deposited by atomic layer deposition | kor |
dc.type | Thesis | - |
dc.contributor.department | 재료공학부 | - |
dc.description.degree | Master | kor |
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