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A-site modification effect of 2-dimensional dielectric nanosheets : A-site 치환에 따른 2차원 유전체 나노시트의 특성 분석
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- Authors
- Advisor
- 성영은
- Major
- 공과대학 화학생물공학부(에너지환경 화학융합기술전공)
- Issue Date
- 2018-08
- Publisher
- 서울대학교 대학원
- Description
- 학위논문 (박사)-- 서울대학교 대학원 : 공과대학 화학생물공학부(에너지환경 화학융합기술전공), 2018. 8. 성영은.
- Abstract
- The demand for high-k dielectric thin films have been continuously increasing to satisfy the requirement of next-generation electronic devices such as ultra-thin dielectric layer in high capacitance multilayer ceramic capacitors and gate dielectric for high mobility thin film transistor. In addition, as these devices are becoming highly integtraed, the thickness of dielectric layer should be reduced under tens of nanometers. The well-known dielectric films for capacitors are BaTiO3 based perovskites. However, these materials usually decrease their dielectric permittivity as thickness reduces because of the size-effect
- Language
- English
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