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유도 결합 플라즈마(ICP) 스퍼터링법에 의한 투명 전도성 ITO 박막의 저온 증착 : Low temperature deposition of transparent conducting ITO films by Inductively Coupled Plasma-assisted DC magnetron sputtering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이정중 | - |
| dc.contributor.author | 구범모 | - |
| dc.date.accessioned | 2009-11-24T03:25:58Z | - |
| dc.date.available | 2009-11-24T03:25:58Z | - |
| dc.date.copyright | 2005. | - |
| dc.date.issued | 2005 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051028 | kor |
| dc.identifier.uri | https://hdl.handle.net/10371/14345 | - |
| dc.description | 학위논문(석사)--서울대학교 대학원 :재료공학부,2005. | kor |
| dc.format.extent | iii, 43 장 | kor |
| dc.language.iso | ko | kor |
| dc.publisher | 서울대학교 대학원 | kor |
| dc.subject | Indium tin oxide(ITO) | kor |
| dc.subject | Indium tin oxide(ITO) | kor |
| dc.subject | 유도결합 플라즈마(ICP) | kor |
| dc.subject | Inductively coupled plasma(ICP) | kor |
| dc.subject | 마그네트론 스퍼터링 | kor |
| dc.subject | sputtering | kor |
| dc.title | 유도 결합 플라즈마(ICP) 스퍼터링법에 의한 투명 전도성 ITO 박막의 저온 증착 | kor |
| dc.title.alternative | Low temperature deposition of transparent conducting ITO films by Inductively Coupled Plasma-assisted DC magnetron sputtering | kor |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Master | kor |
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