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Observation of Ferroelectric Critical Thickness of BaTiO3 Thin Film by Cs-corrected STEM : 구면수차보정 투과전자현미경을 이용한 BaTiO3 산화물 박막의 강유전성 임계두께 관찰 연구

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dc.contributor.advisor김미영-
dc.contributor.author김윤구-
dc.date.accessioned2018-12-03T01:48:42Z-
dc.date.available2018-12-03T01:48:42Z-
dc.date.issued2018-08-
dc.identifier.other000000153076-
dc.identifier.urihttps://hdl.handle.net/10371/144016-
dc.description학위논문 (석사)-- 서울대학교 대학원 : 공과대학 재료공학부, 2018. 8. 김미영.-
dc.description.abstractBaTiO3 is well known for its ferroelectricity. However, its ferroelectricity can be changed under various external conditions. Particularly, the critical thickness that retains ferroelectricity have attracted continuous attention. Thus, it is very important to reveal critical elements that determine the ferroelectricity of BaTiO3 in thin film structure to apply BaTiO3 for electronic devices. In this study, we investigate the possibility of reducing the critical thickness of BaTIO3 of 3.5 unit cell by introducing dielectric SrTiO3 layers, for which, 1unit cell and 10unit cell of SrTiO3 on 2.5unit cell BaTiO3 between SrRuO3 electrodes are compared. Using high-resolution HAADF-STEM imaging, we measured displacements of cations to examine the existence of ferroelectricity for each samples. We extracted atomic peak positions from HAADF-STEM images and calculated ionic displacements of B cations (Ti, Ru), δA-B. From this δA-B, we found that there is ferroelectricity in 1unit cell SrTiO3 sample, however, ferroelectricity disappears 10 unit cell SrTiO3 sample. Ferroelectricity in 1 unit cell SrTiO3 sample was also measured in piezoresponce force microscopy. This difference could be originated from theoretically expected, polarization penetration into electrodes. This result demonstrates that the thickness of the dielectric SrTiO3 layer on BaTiO3 can affect the critical thickness of BaTiO3 ferroelectricity.-
dc.description.tableofcontentsChapter 1 Introduction 1

Chapter 2 Literature Studies 3

2.1 BaTiO3 and its Ferroelectricity 3

2.2 Studies on BaTiO3 thin film structure 5

2.2 Critical Thickness in FE/Dielectric/Metal structure 16

Chapter 3 Experimental Details 18

3.1 Growth and Characterization of BaTiO3 films 18

3.2 Cs-corrected STEM observation and analysis 19

3.2 Piezoresponce Force Microscopy(PFM) 20

Chapter 4 Resuluts and Discussion 22

4.1 Growth and Characterization of BaTiO3 films 22

4.2 Cs-corrected STEM observation and analysis 24

4.2.1 1u.c. SrTiO3 on 2.5u.c BaTiO3 24

4.2.2 10u.c SrTiO3 on 2.5u.c BaTIO3 31

4.3 Piezoresponce Force Microscopy(PFM) 36

Chapter 5 Conclusion 37

References 39

Abstracts(Korean) 41
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dc.formatapplication/pdf-
dc.format.mediumapplication/pdf-
dc.language.isoen-
dc.publisher서울대학교 대학원-
dc.subject.ddc620.1-
dc.titleObservation of Ferroelectric Critical Thickness of BaTiO3 Thin Film by Cs-corrected STEM-
dc.title.alternative구면수차보정 투과전자현미경을 이용한 BaTiO3 산화물 박막의 강유전성 임계두께 관찰 연구-
dc.typeThesis-
dc.contributor.AlternativeAuthorYoonkoo Kim-
dc.description.degreeMaster-
dc.contributor.affiliation공과대학 재료공학부-
dc.date.awarded2018-08-
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