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SiGe으로 채워진 trench형태의 virtual substrate 형성
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 윤의준 | - |
| dc.contributor.author | 정승훈 | - |
| dc.date.accessioned | 2009-11-25 | - |
| dc.date.available | 2009-11-25 | - |
| dc.date.copyright | 2006. | - |
| dc.date.issued | 2006 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047516 | kor |
| dc.identifier.uri | https://hdl.handle.net/10371/14885 | - |
| dc.description | 학위논문(석사)--서울대학교 대학원 :재료공학부,2006. | kor |
| dc.format.extent | vi, 79 장 | kor |
| dc.language.iso | ko | - |
| dc.publisher | 서울대학교 대학원 | kor |
| dc.subject | UHV-CVD | kor |
| dc.subject | UHV-CVD | kor |
| dc.subject | HR-TEM | kor |
| dc.subject | HR-TEM | kor |
| dc.subject | SEM | kor |
| dc.subject | SEM | kor |
| dc.subject | Si trench | kor |
| dc.subject | Si trench | kor |
| dc.subject | SiGe | kor |
| dc.subject | SiGe | kor |
| dc.subject | 전위 | kor |
| dc.subject | dislocation | kor |
| dc.subject | 결함 | kor |
| dc.subject | defect | kor |
| dc.subject | shallow trench | kor |
| dc.subject | shallow trench | kor |
| dc.title | SiGe으로 채워진 trench형태의 virtual substrate 형성 | kor |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Master | kor |
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