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Silicon nanowire growth on Si(111) by UHV-CVD : 초고진공 화학기상증착법을 이용한 (111) 기판 위 실리콘나노선 성장
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 윤의준 | - |
| dc.contributor.author | 정혜경 | - |
| dc.date.accessioned | 2009-11-25T03:21:01Z | - |
| dc.date.available | 2009-11-25T03:21:01Z | - |
| dc.date.copyright | 2007. | - |
| dc.date.issued | 2007 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000043724 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/15100 | - |
| dc.description | 학위논문(석사) --서울대학교 대학원 :재료공학부,2007. | eng |
| dc.format.extent | vii, 56 장 | eng |
| dc.language.iso | en | eng |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 실리콘 | eng |
| dc.subject | Silicon (Si) | eng |
| dc.subject | 나노구조 | eng |
| dc.subject | nano structure | eng |
| dc.subject | 나노선 | eng |
| dc.subject | nanowire | eng |
| dc.subject | 급속열처리 | eng |
| dc.subject | rapid thermal annealing (RTA) | eng |
| dc.subject | 초고진공 화학기상증착법 | eng |
| dc.subject | ultra-high vacuum chemical vapor deposition (UHV-CVD) | eng |
| dc.subject | 타이타늄 | eng |
| dc.subject | titanium (Ti) | eng |
| dc.subject | 금속촉매 | eng |
| dc.subject | metal catalyst | eng |
| dc.subject | 기상-액상-고상 기구 | eng |
| dc.subject | vapor-liquild-solid (VLS) mechanism | eng |
| dc.subject | 타이타늄-실리콘-산소 삼원상태도 | eng |
| dc.subject | Ti-Si-O thenary phase diagram | eng |
| dc.title | Silicon nanowire growth on Si(111) by UHV-CVD | eng |
| dc.title.alternative | 초고진공 화학기상증착법을 이용한 (111) 기판 위 실리콘나노선 성장 | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Master | eng |
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