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백색광 주사 간섭계에서의 HCF를 이용한 박막두께 측정 : Study on thin-film thickness measurement using HCF in white-light phase shifting Interferometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박희재 | - |
| dc.contributor.author | 권순양 | - |
| dc.date.accessioned | 2019-07-09T16:04:15Z | - |
| dc.date.available | 2019-07-09T16:04:15Z | - |
| dc.date.issued | 2011-08 | - |
| dc.identifier.other | 000000031640 | - |
| dc.identifier.uri | https://hdl.handle.net/10371/157396 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000031640 | ko_KR |
| dc.description | 학위논문 (석사)-- 서울대학교 대학원 : 기계항공공학부, 2011.8. 박희재. | - |
| dc.format.extent | viii, 31장 | - |
| dc.language.iso | kor | - |
| dc.publisher | 서울대학교 대학원 | - |
| dc.subject | 투명박막 | - |
| dc.subject | 박막 두께 | - |
| dc.subject | 백생광 위상 천이 간섭계 | - |
| dc.subject | 푸리에변환 | - |
| dc.subject | HCF | - |
| dc.subject | Transparent thin film | - |
| dc.subject | Film Thickness | - |
| dc.subject | White light phase shifting interferometry | - |
| dc.subject | Fourier Transform | - |
| dc.title | 백색광 주사 간섭계에서의 HCF를 이용한 박막두께 측정 | - |
| dc.title.alternative | Study on thin-film thickness measurement using HCF in white-light phase shifting Interferometry | - |
| dc.type | Thesis | - |
| dc.type | Dissertation | - |
| dc.description.degree | Master | - |
| dc.contributor.affiliation | 기계항공공학부 | - |
| dc.date.awarded | 2011-08 | - |
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