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Fabrication and measurement of mechanically coupled SiN nanomechanical resonators
역학적으로 연결된 SiN 나노 역학 진동자의 제작 및 측정

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Authors
장동현
Advisor
박윤
Major
물리·천문학부(물리학전공)
Issue Date
2011-02
Publisher
서울대학교 대학원
Keywords
마이크로나노 전기 역학계나노역학역학적 결합Q인자SiN 진동자결합력MicroNanoelectromechanical system(MEMSNEMS)nanomechanicsmechanical couplingQ factorSiN resonatorcoupling strength
Description
학위논문 (석사)-- 서울대학교 대학원 : 물리·천문학부(물리학전공), 2011.2. 박윤.
Language
eng
URI
http://hdl.handle.net/10371/157586

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College of Natural Sciences (자연과학대학)Dept. of Physics and Astronomy (물리·천문학부)Physics (물리학전공)Theses (Master's Degree_물리학전공)
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