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Fabrication and measurement of mechanically coupled SiN nanomechanical resonators : 역학적으로 연결된 SiN 나노 역학 진동자의 제작 및 측정
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- Authors
- Advisor
- 박윤
- Major
- 물리·천문학부(물리학전공)
- Issue Date
- 2011-02
- Publisher
- 서울대학교 대학원
- Keywords
- 마이크로 ; 나노 전기 역학계 ; 나노역학 ; 역학적 결합 ; Q인자 ; SiN 진동자 ; 결합력 ; Micro ; Nanoelectromechanical system(MEMS ; NEMS) ; nanomechanics ; mechanical coupling ; Q factor ; SiN resonator ; coupling strength
- Description
- 학위논문 (석사)-- 서울대학교 대학원 : 물리·천문학부(물리학전공), 2011.2. 박윤.
- Language
- eng
- URI
- https://hdl.handle.net/10371/157586
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000029622
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