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Study on characterization of the nanoscale patterns fabricated by thermal nanoimprint lithographic process : 나노 임프린트 공정으로 구현된 나노패턴의 특성에 관한 연구
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 이우일 | - |
dc.contributor.author | 이동언 | - |
dc.date.accessioned | 2019-07-10T03:16:05Z | - |
dc.date.available | 2019-07-10T03:16:05Z | - |
dc.date.issued | 2011-08 | - |
dc.identifier.other | 000000031030 | - |
dc.identifier.uri | https://hdl.handle.net/10371/158480 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000031030 | ko_KR |
dc.description | 학위논문 (박사)-- 서울대학교 대학원 : 기계항공공학부, 2011.8. 이우일. | - |
dc.format.extent | xvi, 108 p. | - |
dc.language.iso | eng | - |
dc.publisher | 서울대학교 대학원 | - |
dc.subject | 나노임프린트 리소그래피 | - |
dc.subject | 점착력 | - |
dc.subject | 고분자 | - |
dc.subject | 원자현미경 | - |
dc.subject | 미세구조물 | - |
dc.subject | NIL | - |
dc.subject | Adhesion | - |
dc.subject | Polymer | - |
dc.subject | AFM | - |
dc.subject | Pull-off Force | - |
dc.subject | Nano-pattern | - |
dc.subject | Nano Technology | - |
dc.title | Study on characterization of the nanoscale patterns fabricated by thermal nanoimprint lithographic process | - |
dc.title.alternative | 나노 임프린트 공정으로 구현된 나노패턴의 특성에 관한 연구 | - |
dc.type | Thesis | - |
dc.type | Dissertation | - |
dc.description.degree | Doctor | - |
dc.contributor.affiliation | 기계항공공학부 | - |
dc.date.awarded | 2011-08 | - |
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