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LTPS TFTs with an Amorphous Silicon Buffer Layer and Source/Drain Extension
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Hye In | - |
dc.contributor.author | Sung, Jung Min | - |
dc.contributor.author | Cho, Hyung Uk | - |
dc.contributor.author | Kim, Yong Jo | - |
dc.contributor.author | Park, Young Gwan | - |
dc.contributor.author | Choi, Woo Young | - |
dc.date.accessioned | 2022-10-26T07:22:55Z | - |
dc.date.available | 2022-10-26T07:22:55Z | - |
dc.date.created | 2022-10-19 | - |
dc.date.issued | 2021 | - |
dc.identifier.citation | Electronics (Basel), Vol.10 No.1, p. 29 | - |
dc.identifier.issn | 2079-9292 | - |
dc.identifier.uri | https://hdl.handle.net/10371/186906 | - |
dc.description.abstract | A low leakage poly-Si thin film transistor (TFT) is proposed featuring hydrogenated amorphous silicon (a-Si:H) buffer layer and source/drain extension (SDE) by using technology computer aided design (TCAD) simulation. This architecture reduces off-current effectively by suppressing two leakage current generation mechanisms with little on-current loss. The amorphous silicon buffer layer having large bandgap energy (E-g) suppresses both thermal generation and minimum leakage current, which leads to higher on/off current ratio. In addition, the formation of lightly doped region near the drain alleviates the field-enhanced generation in the off-state by reducing electric field. TCAD simulation results show that the proposed TFT shows more than three orders of magnitude lower off-current than low-temperature polycrystalline silicon (LTPS) TFTs, while maintaining on-current. | - |
dc.language | 영어 | - |
dc.publisher | MDPI AG | - |
dc.title | LTPS TFTs with an Amorphous Silicon Buffer Layer and Source/Drain Extension | - |
dc.type | Article | - |
dc.identifier.doi | 10.3390/electronics10010029 | - |
dc.citation.journaltitle | Electronics (Basel) | - |
dc.identifier.wosid | 000605769900001 | - |
dc.identifier.scopusid | 2-s2.0-85098580411 | - |
dc.citation.number | 1 | - |
dc.citation.startpage | 29 | - |
dc.citation.volume | 10 | - |
dc.description.isOpenAccess | N | - |
dc.contributor.affiliatedAuthor | Choi, Woo Young | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
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