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Issue Date | Title / Author(s) / Citation | File | Altmetrics |
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2018-12 | 2018 INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM), p. 8651157 | DOI | |
2021-06 | Materials, Vol.14 No.11, p. 3005 | DOI | |
2021-12 | Atoms, Vol.9 No.4, p. 100 | DOI | |
2022-02 | Journal of the Korean Physical Society, Vol.80 No.3, pp.233-240 | DOI | |
2022-04 | Current Applied Physics, Vol.36, pp.183-186 | DOI | |
2022-04 | Journal of the Korean Physical Society, Vol.80 No.8, pp.647-669 | DOI | |
2022-08 | Plasma Sources Science and Technology, Vol.31 No.8, p. 084006 | DOI |
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